CONCLUSIONS
In summary, we have investigated the antimicrobial
activity of Ag NPs films prepared by DC magnetron
sputtering technique. Their optical properties were
analyzed by UV-Vis spectroscopy, while, the structure and morphological properties were investigated
by XRD, FE-SEM, and AFM, respectively. Besides,
their antimicrobial efficacy is tuned by adjusting the
change of morphology of Ag NPs, such as density
distribution and particle size. The results show that
the E. coli anti-bacterial efficacy of the Ag-300 sample
could reach up to ~100%. This can be attributed to the
change in the particle size and surface morphology of
Ag NPs leading to the change of the Ag NPs toxicity.
The work also provides a better understanding of the
effect of Ag NPs morphology in enhancing the surface plasmon resonance related to Ostwald ripening
processes that can be developed more efficient desired
antimicrobial systems under the visible regime in the
future.
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Science & Technology Development Journal, 22(4):356- 364
Open Access Full Text Article Original Research
1Faculty of Physics and Engineering
Physics, VNUHCM-University of Science
2Falculity of Physics, Dong Thap
University
3Faculty of Chemistry,
VNUHCM-University of Science
Correspondence
Vu Thi Hanh Thu, Faculty of Physics and
Engineering Physics,
VNUHCM-University of Science
Email: vththu@hcmus.edu.vn
History
Received: 2019-06-30
Accepted: 2019-11-14
Published: 2019-12-31
DOI : 10.32508/stdj.v22i4.1691
Copyright
© VNU-HCM Press. This is an open-
access article distributed under the
terms of the Creative Commons
Attribution 4.0 International license.
Characterization of the silver thin films produced at different
substrate temperatures
Ton Nu Quynh Trang1, Le Thi Ngoc Tu2, Tran VanMan3, Vu Thi Hanh Thu1,*
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ABSTRACT
Introduction: In recent decades, the antimicrobial surfaces/coating properties towards a long-
lasting microbicidal effect have drawn enormous attention by researchers, they have been devel-
oped and used in a wide variety of high-touch hospital devices as a potential approach. Methods:
In this work, Ag NPs was synthesized by sputtering method at the different annealing tempera-
tures of 100C, 200C, 300C, and 400C. Results: As a result, the as-synthesized Ag-300 exhibits
the highest E. coli antibacterial performance compared with others. This can be attributed to the
change of the Ag NPs toxicity based on the growth of nanoparticles during the deposition process
related to the Ostwald ripening process, thermal activation and coalescence particles. Conclu-
sion: This work provides an essential insight into the antimicrobial activity of Ag NPs-based films
synthesized through the vacuum deposition technique, resulting in opening a new approach for
enhancing the antimicrobial efficacy and prospects.
Keywords: Silver nanoparticles, antibacterial mechanism, vacuum deposition techniques, toxicity
INTRODUCTION
Nanoparticles (NPs) have been considered as one of
the most promising alternatives for traditional ma-
terials in many fields of science and technology 1,2,
due to nanoscale approaching physical characteris-
tics and functionalities that can be assigned to the
different from their bulk counterparts. As an exam-
ple, the antibacterial performance of nanomaterials
such as ZnO, TiO2, and Ag NPs have drawn enor-
mous attention in recent years for their desired appli-
cations in biomedical applications, water disinfection,
and consumer goods3,4. However, a current draw-
back is the synthesis and application of nanoparti-
cles to implement effective measures that can prevent
wound infections burns and chronic ulcers associated
with healthcare caused by microorganisms. Specifi-
cally, healthcare-associated infections have been con-
sidered as one of the global threats related to bacterial
pathogen emergence and one of the main reasons for
patient morbidity and mortality. Indeed, an approxi-
mated 20% to 40% of health associated with the infec-
tion fields was reported 5. Among all nanomaterials,
silver nanoparticles (Ag NPs) not only have attracted
more attention in healthcare-associated fields but also
considered as one of the most promising candidates
for potential medical applications in recent years due
to their unique nano-physicochemical characteristics
and broad-spectrum antimicrobial activity 6,7. Previ-
ous studies reported that Ag NPs, which synthesized
in a similar way to form silver ions, exerted against
bacteria through a multifactorial process, and they
were associated with inhibiting the growth of harmful
bacteria as they were harm to the bacterial cell wall
and plasma membrane or restraint on DNA replica-
tion and protein8. They could be released by the nat-
ural formation of ion Ag in the presence of reductive
components in the environment9.
Moreover, the characteristic features of nanoparticles
such as size, shape, density distribution have been
demonstrated to affect the antibacterial activity of Ag
NPs significantly, this could be attributed to a dif-
ferential release of Ag+ ions10. Previous researches
in this field suggested that the effects of shapes and
sizes prepared by wet chemical reduction methods or
biosynthesis play a significant role in the antimicro-
bial nature of Ag NPs11–14. These methods have been
devoted to controlling the size and shape of the Ag
NPs, however, still, some obstacles such as the pres-
ence of colloidal stabilizers or impurities, the toxic
solvents, and the sophisticated synthesis process to re-
duce or suppress the aggregation phenomenon in so-
lution were detected15–17. Good adhesion between
the AgNPs and the substrate has great potential in the
practical applications, while, themere synthesis of the
Ag NPs is rather hard for most of the desired appli-
cations. Therefore, an explored alternative route has
been centered on solving the aforementioned draw-
backs of wet chemical methods. Amongst, vacuum
Cite this article : Quynh Trang T N, Ngoc Tu L T, Van Man T, Hanh Thu V T. Characterization of the silver
thin films produced at different substrate temperatures. Sci. Tech. Dev. J.; 22(4):356-364.
356
Science & Technology Development Journal, 22(4):356-364
deposition techniques consist of thermal evapora-
tion, magnetron sputtering and pulsed laser deposi-
tion have drawn enormous attention in recent years
and considered as an effectivemethod to expand their
applications because it can be grown on large surface
areas with good quality, easy control in fabrication
process, and environmentally friendly based on dif-
ferent preparation conditions. In which, the temper-
ature factor has been considered as one of the most
critical factors for a reaction, adhesion and phase sep-
arated morphology at the interface that can affect the
change inmorphology on flat substrates in the growth
process of the thin film significantly. Compared with
other Ag types (Ag suspension, powder), Ag thin
film on the flat substrates has some advantages i) they
can save the material that can obtain the surface an-
tibacterial performance equally ; ii) the diffusion of
Ag nanoparticles into the environment is limited due
to the good adhesion of Ag nanoparticles on the sub-
strates deposited via sputtering method.
In this work, Ag NP films have been prepared by DC
magnetron sputtering directly on the surface of glass
at the different annealing temperature from 100C
to 400C to investigate the change of the crystalline
structure, optical, morphology, and their antibacte-
rial activity against various E. Coli bacteria. These
results support the new approach for the design and
synthesis of other precious metal as Ag thin films on
plane substrates.
METHODS
Materials
Ag target (with a purity of 99.99% and size of 76 x 5
mm, Advantage, Singapore), hydrochloric acid (HCl,
36%, Sigma-Aldrich), acetone (Sigma-Aldrich), dou-
ble distilled water. All other chemicals were used as
received without further purification.
Preparation of Ag NPs film
In this study, Ag nanostructured films were deposited
at room temperature by using DC magnetron sput-
tering on the corning glass (size of 76 x 26 x 1 mm,
Marienfeld, Germany 900), and the base pressure
was around 5 x10 5 Torr. First, the glass substrates
were cleaned thoroughly in hydrochloric acid, ace-
tone, then ultrasonicated in double distilled water in
15 min. Finally, substrates were dried under a stream
of nitrogen. Before sputtering, argon plasmawas used
to etch the surface of the substrate for 10 min in order
to remove residual particles on the substrate surface.
The substrate holder was rotated at a speed of 5 rpm
during deposition. While the target was pre-sputtered
for 5 min to dismiss contaminants and oxidized lay-
ers. TheAg target power was set at 9W, the Ar gas was
usedwith a flow rate of 18 sccm, and the total pressure
was approximately 2.5 x 10 3 Torr. The amount of
Ag was deposited with a constant time at 30 seconds,
and the substrate temperatures are changed between
100C and 400C. Moreover, the corresponding sam-
ples were denoted as Ag-y, where y was substrate tem-
peratures.
Characterization
The structure and crystallinity of films were further
investigated using X-ray diffraction measurements
recorded using a Bruker D8 ADVANCE system with
CuKa radiation source (l=0.154056 nm). The surface
morphology of the films was observed using Hitachi
S-4800 scanning electron microscopy (SEM, Hitachi
S-4800) at room temperature, and atomic force mi-
croscopy (AFM, SPM 5500, USA). The optical prop-
erties of the films were characterized using a JASCO-
V670 spectrophotometer ranging from 300 to 800 nm
scan rate of 200 nm.min 1 at room temperature.
E. coli a ntibacterial experiment
Bacterial culturing and plating were conducted fol-
lowing the standard methods described in previous
research18,19. The 1 106 colony-forming unit cul-
ture was allowed to drip on both o n the surface of
Corning glass containing the Ag NP film and in an
unmodified glass slide (blank slide). They were then
placed at room temperature. In the E.coli antibacterial
performance test, all the experiments were conducted
in a sterile environment. For all samples, the serial di-
lutionwas done, and the dilutionwas then spread uni-
formly on the surface into culture nutrient agar plates,
and this plate was incubated at 37oC for 24 hours. The
bactericidal activity of Ag NPs was investigated by the
spread plate method. Finally, the number of colonies
grown on the agar plates was counted and killing (%)
efficacy of Ag NPs was calculated using the following
equation:
E.coli a ntibacterial efficacy (%) = [( Ncontrol –
Ntreated)/Ncontrol ] x 100, where Ncontrol , Ntreated are
numbers of bacteria grown on the agar plates follow-
ing treatment with glass and Ag NPs films, respec-
tively.
RESULTS
The crystal structures of the Ag NPs films were char-
acterized by X-ray diffraction patterns, and the re-
sults are shown in Figure 1. The diffraction peak ap-
pears at 2 q = 38.2 and 44.4 corresponding to lat-
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Science & Technology Development Journal, 22(4):356-364
tice plane (111), (200) of silver crystal particle, respec-
tively (JCPDS cards no 04-0783). As shown in Fig-
ure 1, t he XRD patterns are significantly changed at
various substrate temperatures from 100C to 400C.
It is clearly observed that the peak intensity of crys-
tal planes further enhances with increasing substrate
temperature, which is mainly governed by improving
in crystallinity of the face-c entered cubic phase of Ag.
The preferred orientation of the Ag along with (111)
and (200) plane is observed. Also, these peaks become
more dominant at higher substrate temperatures; this
might be associated with the thermodynamic phase
boundary and surface interdiffusion phenomenon.
While surface interdiffusion considered as the dom-
inant kinetic process that plays a central role in con-
trolling the crystalline morphology of the film. No
typical diffraction peaks corresponding to silver ox-
ide are observed, which maybe below the XRD de-
tection limit20. Moreover, the (111) plane has a high
atomic density of electrons that hasmore favorable for
highly reactive21. Therefore, their antibacterial effi-
ciency againstE. Coli ofAgNPs is enhanced due to the
interaction of the bacterial surface morphology with
(111) plane.
The prepared samples are further evaluated by SEM to
reveal the morphology characteristics of Ag NPs, and
the results are shown in Figure 2.
As can be seen in Figure 2, when the substrate tem-
perature increases, the particle size of Ag films in-
creases leading to an increase in the mobility of sil-
ver atoms on the surface. This can be indicated that
the distribution of Ag atoms is extremely in homoge-
neous that is governed by both local thermal energy
and partially crystallizes the silver atoms. The par-
ticle size increases from 10 to 50 for substrate tem-
perature at 100 to 400, respectively. Among all these
types, the Ag-400 sample tends to the coalesce and
form clusters, an enlargement of the clusters is linked
to each other forming a film with a large open area
fraction. With increasing the substrate temperature,
surface characteristics such as number density, shape,
size, inter-particle distance, and surface were adjusted
through some scenarios22,23. At room temperature of
growth, the nanoparticles are almost disordered that
may be attributed to the streams of atoms based on
moving and collision with each other on the surface.
After a further 100C, atom movement is faster, this
has resulted in the formation of single crystalline. Af-
ter 200C and above, the integration of atom clus-
ters is almost completed with the rearrangement pro-
cess during their progression to becoming more crys-
talline.
Moreover, the integration of many atom clusters into
one governing structure can have a severe impact on
the final structure of nanoparticles. This is attributed
to the thermodynamic driving force that plays a cen-
tral role in phase separation. However, the mecha-
nism of phase separation is rather difficult to iden-
tify continuous or discontinuous transformation for
these thin films, which was deposited at an elevated
temperature. These have resulted in frozen in place
by the incoming flux as reported by Adams et al.24.
That can highly impact the antibacterial activity of Ag
nanoparticles.
It is also interesting to consider whether Ostwald
ripening processes, which aremainly governed by dif-
fusion or coalescence of single atoms driven by a gra-
dient in chemical potential causing the interchange of
the neighboring atoms. This may also provide valu-
able insight into the growth of larger nanoparticle,
more stable particles. As regards, the neighboring of
twoAgNPs (themarked yellow circles denoted as Par-
ticle 1 and Particle 2) shows in Figure 2. Particle 1 re-
duces in size, whereas, particle 2 achieves a larger size
after increasing temperature deposition for 400C, in-
dicating that the particle appearance through an Ost-
wald ripening mechanism in this scenario ha s hap-
pened that forms a dense close-packed structure for
400C as shown Figure 2d. These results indicate that
this phenomenon plays a key role in the E. coli anti
bacterial of Ag NPs films.
In order to understand further the role of increasing
substrate temperature to the evolution of surfacemor-
phology, the root means square (RMS) roughness in
Ag thin films was investigated by AFM analysis, as
shown inFigures 3 and4. The results have shown that
the particle size increases with increasing substrate
temperature. This can be attributed to the increased
mobility of silver atoms due to the arising of local ther-
mal energy lead to the formation of the disordered Ag
phase25. Moreover, the root means square and aver-
age grain size of Ag thin films increase with arising
the substrate temperature, as shown in Figure 4e. The
RMS values of Ag thin films at various substrate tem-
peratures were 0.8, 1.5, 2.2, 3.5, and 6.0 mm, respec-
tively. Moreover, the surface appears rougher surface
with more wrinkles (Figure 3d). Obviously, with in-
creasing the substrate temperature from 100 to 400,
the particle size and the RMS values increase, this is
mainly attributed to the Ostwald ripening processes
and the increment of energy surface at high tempera-
ture. In the case of Ostwald ripening, the higher sur-
face to volume ratio and formation of bigger particles
appeared due to coalescence. These are increased the
particle size and inter particle distance26. In order to
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Science & Technology Development Journal, 22(4):356-364
Figure 1: XRD patterns of Ag thin films at different substrate temperatures from 100Cto 400C.
Figure 2: SEM images of substrate temperature of Ag NPs films at (a) 100C, (b) 200C, (c) 300C, and (d) 400C,
respectively.
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Science & Technology Development Journal, 22(4):356-364
better understand the mechanism of the growth Ag
with increasing substrate temperature, a schematic of
the growth in morphology is illustrated in Figure 5.
In order to provide further information about its im-
pact on optical properties based on their stage ofmor-
phological evolution, theUV-Visible absorption spec-
troscopy was used to evaluate the optical properties of
samples. The absorption spectra of Ag NPs films at
different substrate temperatures are clearly displayed
in Figure 6. The variation of distribution in parti-
cle sizes of the Ag NPs film is attributed to the in-
homogeneous broadening of the plasmon resonance
peak. According toMie theory18, the particle size de-
creased, the efficiency of absorption would be dom-
inated over the scattering efficiency. Therefore, par-
ticles with a small size would be given rise to en-
hanced plasmon resonance. However, the distance
between particles is large, so that coherent phase re-
lations among the scattered light from different par-
ticles was not observed. Moreover, the red shift of
the peak in the dipole resonance has been observed
with increasing the particle size, which is assigned to
the weakening of the restoring force. This can be ex-
plained by the increase of distance between charges on
opposite sides of the particles, leading to a reduction
in interaction. It is observed that the surface plasmon
resonance (SPR) peak for Ag NPs films has a strong
absorption at 450 nm corresponding to the dipolar
resonance of Ag NPs. According to Figure 6 revealed
that the AgNPs film at various substrate temperatures
shows a broadening and red shift of SPR spectra. At
substrate temperatures 100C, the dramatic broad-
ening along with pronounced red shift is obtained.
This broadening can be attributed to the increase in
particle size due to not much change in surface cov-
erage, except crystalline form can be transformed. As
a result, the optical properties of Ag nanostructures
were dependent on their surfacemorphology through
their growth stages.
It is well-known that silver has been considered as
one of the most promising candidates to prevent
infections for thousands of years. However, the
silver-induced bactericidal effect is a complicated re-
sponse related to the disruption of bacterial physiolo-
gies, such as the formation of disulfide bonds, iron
metabolism, and homeostasis. So, in order to fur-
ther evaluate the relationship between the particle size
and toxicity of Ag NPs in eradicating Escherichia coli
pathogenic, the live bacteria cells are treated with Ag
NPs films at different substrate temperatures 100, 200,
300, and 400C respectively, as delineated Figure 7.
These results indicate that the percentage of surviv-
ing bacteria reduces with increasing substrate tem-
perature, suggesting that the antimicrobial efficacy in-
creases while at 400C, the antimicrobial efficacy de-
creases. The substrate temperature plays a vital role in
the E. coli antibacterial activity that is assigned to the
significant change in the particle size and surfacemor-
phology of AgNPs, as displayed in Figures 2, 3 and 4.
In which, Ag-300 exhibits the highest the E. coli an-
timicrobial efficiency compared with others due to i)
the high interaction between Ag NPs and E.coli bac-
teria based on the uniform distribution between the
adjacent AgNPs, ii) the high toxicity path of Ag NPs
based on the regular shapes and appropriate sizes of
Ag NPS.
DISCUSSION
It is a fact that the increase of Ag NPs particle size is
significantly reduced the specific surface area. There-
fore, the release of dissolvedAg species ismarkedly re-
tarded. As a result, their toxicity responses are lower.
Therefore, it is essential to investigate the change in
the particle size that may be caused by the dramatic
change in toxicity and surface area of Ag NPs. Recent
studies have reported that the highly efficient E. coli
antibacterial activity of Ag NPs can be ascribed to the
large surface area due to the interactions between the
surface area of particles and microbial cells.
For instance, Morones et al. reported that the highly
efficient antimicrobial performance of Ag NPs is due
to the large surface area, which means that the per-
centage of the interaction of small particles was higher
than larger particles of the same parent material 19.
Acharya et al. demonstrated that the distortion of the
bacterial cell membrane byAg nanosphere was higher
than one-dimension nanostructure (Ag nanorod),
which could mainly be governed by the granulate
shape with a larger specific surface area as compared
with 1-Dimension nanostructure (Ag nanorod) with
low specific surface area 27. Also, Hong et al. revealed
that the nanosphere had a larger effective specific con-
tact area, which means that they quickly achieved the
interaction with bacterial cells and caused more dam-
ages28. Thus, based on the above observations, it can
be concluded that the specific surface area of Ag NPs
plays a vital role in antimicrobial efficacy. Besides, it
is clearly observed that AgNPswith small particle size
is shown to bemore damaged as comparedwith larger
particles in the silver-induced bactericidal because the
smaller Ag NPS can be more easily penetrated E. coli
bacteria than largerAgNPs orAgNPs aggregates. This
also substantiate s the difference in the respective par-
ticle size as shown in SEM images (Figure 2). Accord-
ing to recent studies confirmed that the accumulation
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Science & Technology Development Journal, 22(4):356-364
Figure 3: 2D AFM images of Ag thin films at various of substrate temperature (a) room temperature, (b) 100C, (c)
200C, (d) 300C, and (e) 400C.
Figure 4: 3D AFM images of Ag thin film at various of substrate temperature (a) 100C, (b) 200C, (c) 300C, and
(d) 400C. (e) RMS values and average grain size of Ag thin films at different substrate temperatures.
361
Science & Technology Development Journal, 22(4):356-364
Figure 5: Schematic of the growth inmorphology as a result of increasing substrate temperature.
Figure 6: UV-vis spectra of different annealing temperatures from 100C to 400C of Ag NPs films.
of different sizes of Ag NPs in the food chain was in-
vestigated the toxicity of AgNPs and Ag+ ions during
the antimicrobial process. The results revealed that
some of the small Ag NPs remained in the digestive
lumen, subcutaneous tissue, and gonad. This veri-
fied that the Ag NPs uptake at the intracellular level
and only small particles or partial aggregation of sil-
ver nanoparticles were detected in the cells, whereas
larger aggregation was not internalized in E. coli29–31.
On the other hand, the antibacterial efficacy of Ag
NPs films is affected by controlling the toxicity path of
AgNPs based on changing the particle size. The small
AgNPs inducedmore cellular toxicity than larger par-
ticles. For example, Liu et al. reported that Ag NPs
with size particle of 5 nm had more toxicity than 20
and 50 nm Ag NPs towards human cells32. Wang et
al. reported that Ag NPs nanoparticle size of 10 nm
was much more cytotoxic than 40 and 75 nm Ag NPs
to human lung cells. However, toxicity between 10
nm citrate and 10 nmPVP-coatedAgNPswas not ob-
served33. These results are well justified deduce that
the Ag NPs toxicity related to their antimicrobial effi-
ciency not only dependent particle size but also based
on bacterial type. The toxicity plays a significant role
in the antimicrobial capability of Ag NPs, which is at-
tributed to the release of Ag+ cations that can be in-
teracted with cells and intracellular macromolecules
such as proteins and DNA. Besides, an accumulation
of intercellular reactive oxygen species (ROS) reacts
directly with protein and causes oxidative stress. So,
the partial or permanent loss of structure and/or func-
tion of the cellular proteinmay be caused by the above
processes leads to the bacterial growth is inhibited.
On the other side, the Ag NPs shows excellent E. coli
antibacterial effect at different substrate temperature
due to the presence of (111) plane. This can be at-
tributed to the plane contains a high atomic density
of electrons. Overall, our results showcased that Ag
NPs films can inhibit the growth of bacteria based on
the density distribution and particle size of Ag NPs
leading to the change of their toxicity.
CONCLUSIONS
In summary, we have investigated the antimicrobial
activity of Ag NPs films prepared by DC magnetron
sputtering technique. Their optical properties were
analyzed by UV-Vis spectroscopy, while, the struc-
ture and morphological properties were investigated
by XRD, FE-SEM, and AFM, respectively. Besides,
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Science & Technology Development Journal, 22(4):356-364
Figure 7: Development of E. coli colonies (a) and E. coli antibacterial activity of different substrate temperatures
of Ag NPs films against E. coli calculated by plate count method (b).
their antimicrobial efficacy is tuned by adjusting the
change of morphology of Ag NPs, such as density
distribution and particle size. The results show that
the E. coli anti-bacterial efficacy of the Ag-300 sample
could reach up to~100%. This can be attributed to the
change in the particle size and surface morphology of
Ag NPs leading to the change of the Ag NPs toxicity.
The work also provides a better understanding of the
effect of Ag NPs morphology in enhancing the sur-
face plasmon resonance related to Ostwald ripening
processes that can be developedmore efficient desired
antimicrobial systems under the visible regime in the
future.
ABBREVIATIONS
NPs: Nanoparticles
Ag NPs: Silver nanoparticles
COMPETING INTERESTS
The authors declare that there is no conflict of interest
regarding the publication of this article.
AUTHORS’ CONTRIBUTIONS
Ton Nu Quynh Trang has conceived of the present
idea, carried out andwritten themanuscript with sup-
port from Vu Thi Hanh Thu. Ton Nu Quynh Trang
and Le Thi Ngoc Tu carried out the experiments in
group. TranVanMan has supported the analysis tech-
niques.
ACKNOWLEDGMENTS
This research is funded by the University of Science,
VNU-HCM, under grant number T2019-12.
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