Chip vi lưu (Microfluidics) là một linh kiện có khả năng điều khiển chính xác chuyển động
dòng lưu chất với một lượng cực nhỏ. Lĩnh vực này đã và đang được nghiên cứu với nhiều ứng
dụng thực tế trong các lĩnh vực vật lí, hóa học, hóa sinh, công nghệ nano, công nghệ sinh học.
Tuỳ thuộc vào ứng dụng cụ thể mà tỉ số chiều dài/bề rộng kênh được quy định sao cho các hiệu
ứng vật lí, các phản ứng hoá học, xảy ra với hiệu suất cao nhất nhưng với lượng chất sử dụng
thấp nhất. Trong báo cáo này, chip vi lưu từ vật liệu PDMS được chế tạo bằng phương pháp
khắc mềm (Soft Lithography) với tỉ số chiều dài/ bề rộng có thể đạt được 3000 lần, đã và đang
được chế tạo để phục vụ hiệu quả cho các nghiên cứu trong lĩnh vực y sinh.
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Journal of Science and Technology 54 (1A) (2016) 168-174
FABRICATING THE MICROFLUIDIC CHIP WITH
LENGTH-AND-DIAMETER RATIO OF CHANNEL AROUND 3000
Le Thuy Thanh Giang
1, *
, Pham Minh Tuan
1
, Tran Hong Nhan
1
,
Tran Quang Trung
1
1
Solid State Department, Faculty of Physics – Engineering Physics, University of Science,
Vietnam National University, 227 Nguyen Van Cu St., Ward 4, District 5, Ho Chi Minh City.
*
Email: lttgiang@humus.edu.vn
Received: 03 September 2015; Accepted for publication: 26 October 2015
ABSTRACT
Microfluidics is a device that accurately controls the motion of fluid flow with a very small
amount of liquid. This field has been studied with many empirical applications in physics,
chemistry, biochemistry, nanotechnology and biotechnology. Depending on particular
application, the length-and-diameter ratio of channel is designed specifically in order to gain the
highest efficiency for physical response and chemical reaction, etc. In this report, microfluidic
chips, based on PDMS material, fabricated by soft lithography with the length-and-diameter
ratio of channel 3000 times, have been fabricated for the research on biomedical orientation.
Illustration of microfluidic chip with straight and spiral shape and the length-and-diameter ratio of
channel around 3000.
Keywords: microfluidic chip, PDMS, soft-lithography.
1. INTRODUCTION
In the past two decades, the microfluidic chips, which are able to miniaturize the facilities
in experiments with the micro volumes of fluids (µL, nL, pL or fL), demonstrated useful abilities
and practical applications in the multidisciplinary field, such as health diagnosis, genome and
protein research, chemical analysis, environmental assessment and detection of pathogens, as
well as in the field of other scientific studies [1 - 4]. The equipment using Micro Total Analysis
Systems ( TAS) is more advantageous than traditional sophisticated, expensive and closed
systems, especially in the ability to control fluid flow precisely, minimize the volume of testing
solutions, with short reaction time, allowing analyzing multiple channels in parallel, with less
Fabricating the microfluidic chip with length-and-diameter ratio of channel around 3000
169
operating energy, and low production costs [5].
The research on microfluidic chips, associating with TAS, has attracted much attention of
many researchers in the world as well as in Vietnam. According to specific applications,
configuration of microfluidic chip will be designed suitably about the length, width and height.
Specifically, in the systems detecting the dye concentration based on fluorescence intensity
obtained by J. Hubner et al. [6], the microfluidic chip was devised with 500 m width flow
channel. In the design of a fuel cell of E. Kjeang et al. [7], microfluidic chip had a height of 120
m and a width of 2000 m. In the publication of Tran Hong Nhan et al. [8], the TAS were
designed to determine the concentrations of AlQ3, with 200 m width and 20 m height flow
channels. In this study, we have developped and improved microfluidic chips with
miniaturization the channel size down to 100 m width, and extending the path channel with 02
different configurations (straight and spiral shape) for diversified structures for biomedical
applications in next steps.
The soft lithography method has proved to be a simple, cheap and rapid prototyping
method to fabricate PDMS-based microfluidic channels [9 - 12]. These are important factors of
the chip fabrication for practical applications.
PDMS is the abbreviation of polydimethylsiloxane (H3[Si(CH3)2O] NSi(CH3)3), with
typical characteristics:
o Transparent, colorless, chemically inert, non-toxic and non-flammable.
o Insoluble in water and ethanol, but soluble in Benzene (C6H6), Chloroform (CHCl3),
Toluene (C7H8) and some other organic solvents.
o High transmittance (around 99 %) from the 240 nm to 1100 nm wavelength, being
compatible with a variety of technical analyses and optical microscopy applications.
After mixing with hardener (called PDMS resin), PDMS will become a non-sticky material.
The surface properties of PDMS will change due to oxygen plasma treatment process,
introducing the polar functional group (SiOH) on the surface of the PDMS. This adheres PDMS
to the surface of glass easily.
2. EXPERIMENTAL
PDMS microfluidic chip was manufactured via several steps. First, a mould of straight or
spiral channel structures was prepared. Second, PDMS resin was poured onto the mould and
heated for one and a half hours for solidification. Then it was removed from the mould, and then
holes were punched to make fluid inputs or output ports on this PDMS layer. The next step was
to treat PDMS layer and glass substrate under oxygen plasma to introduce the polarization
adhesion to be much easier in sticking process.
The mould of straight or spiral channel structures for microfluidic fabrication were made of
bakelite plastic covered with a 20 µm thickness of copper and zinc layers used in the electronic
industry for reducing the manufacturing costs of mould [13, 14]. Due to the fact that the
thickness of the copper and zinc layer was only 20 µm thick, fabricated channels were still
suitable with small volumetric fluid flow in µL. The mould were designed with a channel width
of 200 µm and 20 µm in height.
PDMS (Sylgard 184) was mixed with hardener in 10:1 ratio by weight and the mixture was
Le Thuy Thanh Giang, Pham Minh Tuan, Tran Hong Nhan, Tran Quang Trung
170
stirred properly for 5 minutes, then centrifuged to remove air bubbles. Then, the PDMS resin
was poured into the mould and annealed at 65 ºC for 2 hours to accelerate the solidifying process
of PDMS mixture (Figure 1).
Figure 1. PDMS resin in mould after solidifying. Figure 2. The PDMS surface with straight pattern
of channel after being peeled off from the mould.
The PDMS layer, with the formation of channels and reservoirs as designed, was peeled off
from the mould (Figure 2) and two holes were punched for inlet ports and another one for oulet
port. These two inlets were connected to indicating and analytic solutions. The outlet was used
for getting solution from reservoir. Then, this PDMS layer was sticked onto the glass substrate
for microfluidic chip fabrication.
The sticking technique of PDMS layer and glass substrate without deformation or damage
the channel is the most important step of PDMS-based microfluidic chips. In addition, the
elasticity of different materials in solification process also causes the various types of
deformation for chip fabrication. In order to overcome this problem, oxygen plasma technique
has been used. This technique has created the polarization between two surfaces, completely
dismissed intermediate gas layer between them during sticking process. The Van-der-Waals
force between two surfaces (the size of channel is very small compared to pasted surface) is
large enough for adhesive and can suffer the high pressure during the injection of fluid into the
microfluidic chip. At that time the contacting area of PDMS layer and glass surfaces obtained
the dark colour due to the good wettability between PDMS and glass surfaces. Figure 3 (a, b)
show the straight and spiral channels of microfluidic chips after completing the steps above.
Figure 3. The microfluidic chip with straight (a) and (b) spiral channel after finishing.
In order to check the quality of microfluidic chip after fabrication and control the fluid flow
in chip, micro-flow pump system (using step motor) is designed to connect the chip, able to
pump the micro fluid around µL/s (Figure 4). This allows the control fluid flows in micro
channel system correctly.
The micro-flow pump system includes many components: the microfluidic pump, the
control panel, the one-way valve and the Teflon pipes.
The steps for surveying the fluid flow in microfluidic chip with micro-flow pump system:
Fabricating the microfluidic chip with length-and-diameter ratio of channel around 3000
171
o Starting the pump, calibrating and connecting the micro-flow pump system to
microfluidic chip.
o Connecting the micro-flow pump to analytic solution.
o Adjusting the speed of the pump (rpm) and starting the pump.
o After pumping, microfluidic chip can be reused by heating chip to evaporate the
remaining fluid.
Figure 4. The micro-flow pump connecting the microfluidic chip. 1) The micro-flow pump system with
step motor. 2) The control panel. 3) The analyzed solution. 4) The microfluidic chip.
3. RESULTS AND DISCUSSIONS
We have successfully fabricated two types of microfluidic chips with straight and spiral
channel structures. The spiral channel structure has half capacity of the straight one. The
parameters of length, width, height and volume of two types of chip channel flow are shown in
Table 1.
The shape of the straight channel of microfluidic chip, with the length-to-width ratio of
2500, is easy to manufacture due to the large distance between two channels. However, the
substances in the solution can be deposited at the folded points between the channels. In order to
overcome this limitation, the channels without folded points are designed, named the spiral
channel, with the length-to-width ratio of 3200.
The fabricating process of spiral channel microfluidic chip is more difficult than the other
due to the fact that the width of the spiral chip is 125 microns, 37.5 % less than 200 µm width of
the other one, leading to micro-flow channel cross section of the microfluidic chip about 0.0025
mm² to 0.004 mm², so the strong pressure is needed to supply to pump water into the micro flow
channels. Such pressure can cause cracks, leakage between the channels, damaging microfluidic
chip [15]. Therefore, the miniaturization channel is a significant step in the study of microfluidic
chip fabrication.
Le Thuy Thanh Giang, Pham Minh Tuan, Tran Hong Nhan, Tran Quang Trung
172
Table 1. The fabricating parameters of two sets of microfluidic chips with straight and spiral channels.
Figure 5. Microfluidic chips of two sets of channel: straight (a) and spiral are radiating under UV light.
In order to test the microfluidic chip, we pump Rhodamine 6G solution (R6G) into the
channel, then exciting under ultra-violet radiation. R6G is strong fluorescence under UV
wavelengths, so the current of this solution is clearly observed (Figure 5 (a,b)) and there is no
leakage to see here. This demonstrates that the microfluidic chips have been fabricated
successfully.
Next, we check the reliability of microfluidic chip via multiple surveys with micro flow
pump motor step, Figure 4, by pumping distilled water into the channel with the different pump
speeds (rpm). With each pump speed, the time of flowing water in the channel is measured at
least 10 times for each survey in every 10 minutes.
Figure 6. Evolution of flow velocity of two sets of channels: straight and spiral as a function of pump rate.
Figure 6 illustrated the linear relationship between the flow rate ( L/s) and pump speed, in
which squares and dots correspond to straight and spiral channels, respectively. According to
Straight channel Spiral channel
Length (mm) 500 400
Width (mm) 0,2 0,125
Height (mm) 0,02 0,02
Volume (µL) 2 1
Fabricating the microfluidic chip with length-and-diameter ratio of channel around 3000
173
each pump speed, pressure generated in the system is different, causing the difference of current
velocity in the channel. The cross section of spiral channel is smaller than the other, so flow
speed in this spiral channel is smaller than the other, too.
Standard deviation of the flow rate in both two sets of channels is very small, around 10
-4
L/s, while standard deviation from spiral channel is 30 % smaller than the straight one. This
demonstrates that the microfluidic chip has been successfully manufactured with small amounts
of testing substrates, low uncertainty and completely reusable multiple times depending on
practical purposes.
In summary, the length-to-width ratio of microfluidic chip, fabricated from PDMS
materials by soft lithography process, can achieve 2500 times (straight channel) – 3200 times
(spiral channel). This chip can control precisely the micro fluid motion, and is used for many
practical applications in the fields of physics, chemistry, biochemistry, nanotechnology,
biotechnology. The length-to-width ratio of the channel is designed in accordance to the
particular applications so that these physical effects, chemical reactions, etc. occur with the
highest efficiency, but with the lowest amounts of agents.
Acknowledgment. This research is funded by University of Science – Vietnam National University
HoChiMinh City (VNU-HCM) under grant number T2015-09.
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TÓM TẮT
NG IÊN CỨU VÀ C Ế TẠO C IP VI LƯU VỚI TỈ SỐ C IỀU DÀI TRÊN
ĐỘ RỘNG KÊN K OẢNG 3000
Lê Thuỵ Thanh Giang*, Phạm Minh Tuấn, Trần ồng Nhân, Trần Quang Trung
Khoa Vật lý - Vật lý kỹ thuật, Đại học Khoa học tự nhiên, Đại học Quốc gia TP HCM,
227 Nguyễn Văn Cừ, P.4, Q.5, TP. Hồ Chí Minh
*
Email: lttgiang@humus.edu.vn
Chip vi lưu (Microfluidics) là một linh kiện có khả năng điều khiển chính xác chuyển động
dòng lưu chất với một lượng cực nhỏ. Lĩnh vực này đã và đang được nghiên cứu với nhiều ứng
dụng thực tế trong các lĩnh vực vật lí, hóa học, hóa sinh, công nghệ nano, công nghệ sinh học.
Tuỳ thuộc vào ứng dụng cụ thể mà tỉ số chiều dài/bề rộng kênh được quy định sao cho các hiệu
ứng vật lí, các phản ứng hoá học, xảy ra với hiệu suất cao nhất nhưng với lượng chất sử dụng
thấp nhất. Trong báo cáo này, chip vi lưu từ vật liệu PDMS được chế tạo bằng phương pháp
khắc mềm (Soft Lithography) với tỉ số chiều dài/ bề rộng có thể đạt được 3000 lần, đã và đang
được chế tạo để phục vụ hiệu quả cho các nghiên cứu trong lĩnh vực y sinh.
Từ khóa: chip vi lưu, PDMS, khắc mềm.
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