Trong quá trình bốc bay nhiệt hình thành đồng thời hai dạng nano ZnO là dây nano và nano
tetrapod có tỉ số chiều dài/đường kính lớn với cấu trúc đồng nhất. Trong quá trình bốc bay là quá
rình vận chuyển pha hơi của hỗn hợp bột ZnO và Các bon với tỉ lệ khối lượng 1:1 tại nhiệt đô
1100 oC bằng dòng hỗn hợp không khí và N2 có lưu lượng khác nhau. Đặc trưng cấu trúc và hình
thái bề mặt của vật liệu cấu trúc nano ZnO được tổng hợp có cấu trúc tinh thể cao với đường
kính trung binh cỡ 30 nm, chiều dài vài micromet. Báo cáo này chúng tôi đưa ra cơ chế hình
thành đồng thời hai dạng vật liệu trong quá trình vận chuyển pha hơi ở ấp suất khí quyển.
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Journal of Science and Technology 54 (5A) (2016) 107-117
NEW INSIGHTS ON THE MECHANISM OF SEMICONDUCTOR
NANOSTRUCTURES FORMED DURING VAPOR TRANSPORT AT
ATMOSPHERIC PRESSURE
Tran Trung1, *, Hoang Van Han1, Nguyen Van Hieu2,**
1Hung-Yen University of Technology and Education, Khoai Chau, Hung-Yen, Vietnam
2International Training Institute for Materials Science (ITIMS), Hanoi University of Science and
Technology (HUST), 1-Dai Co Viet road, Hanoi, Vietnam.
*Email: tr_trunghut@yahoo.com
Received: 15 July 2016; Accepted for publication: 2 December 2016
ABSTRACT
Co-deposition of two types of high aspect ratio nanostructured ZnO involving nanowires
and nanotetrapods with a uniform structure were carried out through thermal evaporation and
vapor transportation of a mixture of highly pure ZnO and graphite powders in 1:1 weight ratio.
The mixture was heated at 1100 oC under various flow rates of N2 and air mixture. The surface
morphology and structural characteristics of synthesized ZnO nanostructured materials revealed
a highly crystalline structure with an average diameter of about 30 nm and length of several
micrometers. The mechanism of co-deposition of ZnO nanowires and nanotetrapods during
vapor transport at atmospheric pressure was proposed.
Keywords: ZnO nanowires, nanotetrapods, high aspect ratio, co-deposition, vapor phase.
1. INTRODUCTION
Among the various classes of one-dimensional nanostructures, semiconductor nanowires
are a result of anisotropic nanostructure having the diameter in the order of a nanometer, usually
constrained to several tens of nanometers or less and an unconstrained length. These one-
dimensions that can be advantageous are the small diameters, large surface area and smooth
surfaces of the nanowire materials, then they offer unique opportunities to control the density of
states of semiconductors, and in turn their electronic and optical properties. Then semiconductor
nanowires possess several unique characteristics. Their ability to be integrated into electronic
devices, novel sub-wavelength optical phenomena, their large tolerance for mechanical
deformations, their ability to interface with other microscopic and nanoscopic systems in nature,
the decoupling of length scales associated different physical phenomena in the radial and axial
directions, and their high surface-to-volume ratio, have led to an explosion of applications
utilizing these structures. Indeed, since the first report of Radushkevich and Lukianovich, in
1952, on the formation of carbon fibrils by thermal decomposition of carbon oxide during
Tran Trung, Hoang Van Han, Nguyen Van Hieu
108
contact with iron, to date a concept “Semiconductor Nanowires” is became a platform for
nanoscience and nanotechnology where numerous studies have been carried out to explore
nanowires as new building blocks in electronics and photonics [1 – 5], solar cells [6 – 9]
sensors/biosensors [10 – 14], and energy applications [15, 16].
In all the mentioned literatures, the method either physical vapor deposition or chemical
vapor deposition that were used to synthesize the nanowire materials was obeyed to the vapor–
liquid–solid (VLS) mechanism. As to vapor transport depositions, there exist two different
processes which either involve metal catalyst for the nanowires (NWs) growth or not. For both
just mentioned above, the process consists of mass transfer of the material to the reaction zone in
the form of the gas flux of components, their diffusion or molecular beam, adsorption on the
surface and surface diffusion of the components to more favorable sites. In case if the mass
transfer is sufficient and there is supersaturation of the vapors, the limiting factor of NWs
growth is the nucleation rate at the surface. The metal catalyst facilitates growth by introducing a
catalytic liquid alloy phase which can rapidly adsorb components to supersaturation levels, and
from which crystal growth can subsequently occur from nucleated seeds at the liquid–solid
interface by the vapor–liquid–solid (VLS) mechanism. In case of the absence of metal catalyst,
the growth of a crystal takes place through direct adsorption of gaseous components onto crystal
defects of a solid surface, then aggregated into seeds that act as catalyst. In this situation, the
formation and growth of nanowires from these seeds are considered as self-catalyzed process
and similar to the one of the vapor-solid mechanism [17]. However the nucleation conditions at
the interface are often not so favorable as compared with liquid catalyst.
Beside that almost vapor transport depositions to form semiconductor nanowires were
carried out in high vacuum of about 10 Torr or in ultimate vacuum of several 10-3 Torr, the
formation of semiconductor nanowires by the vapor transport deposition have been carried out at
atmospheric pressure [10, 18]. Different from almost the mentioned literatures, in our work the
nanowires growth was fully carried out in vapor phase and at atmospheric pressure, as
represented in figure 1. Now we focus on the comparing the nanowires growth with VLS
mechanism and the one of the nanowires growth in our work.
2. EXPERIMENTAL
As the detailed description of the experiment set up was represented in a previous work
[10], the ZnO nanowires were synthesized through thermal evaporation and vapor transportation
of a mixture of extrapure ZnO powder (Merck, 99.99 %) and graphite powder (Merck) in 1:1
weight ratio that were carefully grounded and mixed. The mixed material was kept in a porcelain
boat (with 1 cm diameter and 8 cm long) and loaded into the centre of a horizontal quartz tube
furnace (with 100 cm long and 4 cm inner diameter). The tube furnace was heated to 1100 oC at
a heating rate of 10 oC/min. One end of the tube was connected to the gas supply and flow
control system. A mixture of highly pure nitrogen gas (99.99 %) and air in 1.7:1 volume ratio
was flowed at a constant rate of 2880 sccm into the tube furnace. The flow rate was modulated
with a digital mass-flow-control system (Aalborg, Model: GFC175-VALD2-A0200, USA). The
reactions began within 2–3 min and continued for approximately 13–15 min, depending on the
amount of initial materials. A striking point here is to use the ambient atmosphere as the oxygen
source for the reaction. The tube furnace was preheated up to and kept at 1100 oC before loading
the source material. The product was deposited onto a borosilicate glass cup positioned out of
the tube furnace (Fig. 1). The as-synthesized product was observed in cotton-white color and
very uniform in diameter and length. The collected ZnO NWs were ultrasonically dispersed in
New insights on the mechanism of semiconductor nanostructures formed during vapor transport
109
ethanol for 48 h until a stable dispersion was obtained. The morphology, size distribution,
crystallinity, and composition of as-synthesized products were characterized using field emission
scanning electron microscope (FESEM 4800, Hitachi, Japan) operating at 10 kV. Transmission
electron microscopy (TEM), selected area electron diffraction (SEAD), and high resolution
transmission electron microscopy (HRTEM) examinations were conducted using a JEOL JEM-
3010 system at an accelerating voltage of 300 kV. The X-ray diffraction (XRD) patterns were
obtained using a Siemens diffractometer with Cu Kα1 radiation.
Figure 1: Diagram generation fabrication of ZnO nanomaterials consists of gas suppliers (1),
a digital mass-flow-control system (2), a gas mixer (3), a gas adjusted valve (4), a horizontal quartz tube
reactor (5), PID controlled program oven (6), the outlet with a borosilicate glass cup.
3. RESULTS AND DISCUSSION
Morphology and structure of as-synthesized ZnO
The as-synthesized product that was obtained in a borosilicate glass cup positioned at the
outlet of the reactor (Fig. 1) was observed in cotton-white color. FE-SEM and TEM studies
revealed that the as-synthesized ZnO product can be distinguished into two regions with two
different morphologies, nanowires and nanotetrapods, as shown in Figures 3 and 4. In more
detailed, it also revealed that structure of the part of the product positioned at the central of the
borosilicate glass cup is consisting of ZnO nanowires. Meanwhile structure of the one positioned
near by the wall of the cup is ZnO nanotetrapods. Figure 2 presents the XRD pattern of as-grown
ZnO NWs, which are identified as hexagonal wurtzite ZnO phase (JCPDS 36-1451) from the
XRD analysis results.
It is interesting to note that no diffraction peaks corresponding to other phases or impurities
are observed. Thus, the XRD pattern clearly reveals the formation of ZnO NWs with wurtzite
structure under the conducted experimental conditions.
The presence of well-defined diffraction peaks of (100), (002), (101), (102), (110), (103),
(200), (112), and (004) clearly reveals that the aggregates of vapor ZnOx molecules are
converted into ZnOx cluster form that are then oxidized into ZnO through absorption of oxygen
atoms by these surfaces. The strong and sharp ZnO peaks with a narrow spectral width indicate
that the synthesized nanowires are highly crystalline.
Tran Trung, Hoang Van Han, Nguyen Van Hieu
110
Figure 2. Representation of XRD pattern of ZnO as-synthesized.
The overall morphologies of the as-synthesized ZnO nanomaterials were studied with FE-
SEM technique. Figure 3(a) shows the low magnification image of the as-synthesized ZnO NWs
in high aspect-ratio structure and heap up together. High magnification image of ZnO NWs (Fig.
3(b)) revealed very uniform ZnO NWs with a diameter of approximately 30 nm and a length of
several micrometers. Additional structural characterizations were conducted using HRTEM
technique. Figure 3(c) shows a low magnification image of a single ZnO nanowire. No voids or
tubular structures were observed, which reveals that the growth of ZnO NWs may occur
immediately in vapor transportation.
For the ZnO product positioned near by the wall of the cup, FE-SEM studies (Fig. 4a)
revealed that as-synthesized ZnO materials have structural morphology of nanotetrapods in high
aspect-ratio structure and heap up together. A higher magnification image (Fig. 4b) the surface
morphology and structural characteristics of synthesized nanotetrapods revealed a high uniform
and highly crystalline structure with an average diameter of about 30 nm and length of several
micrometers, 3÷5 µm.
High-resolution TEM studies of ZnO nanowires (Figs. 3(d)–(f)) and ZnO nanotetrapods
(Figs. 4(d)–(f)) also reveal that ZnO nanostructures are clean, atomically sharp and without any
sheathed secondary phases or stacking faults. In the lattice-resolved scale, the HRTEM images
of ZnO nanowires (Figs. 3(e), (f)) and ZnO nanotetrapods (Figs. 4(f), (h)) show that the length
of the lattice fringe of ZnO nanowire is approximately 0.52 nm, corresponding to the (0001)
fringes perpendicular to the growth direction, which is consistent with that of the bulk wurtzite
ZnO crystal. In addition, SEAD patterns of ZnO nanowires (Figs. 3(d), (f)) and ZnO
nanotetrapods (Figs. 4(d) (f)) reveal clearly visible bright spots corresponding to the crystal
planes of the hexagonal for 1-D wurtzite ZnO nanostructure.
25.03 31.03 37.03 43.03 49.03 55.03 61.03 67.03
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Tran Trung, Hoang Van Han, Nguyen Van Hieu
112
Figure 4. A typical SEM (a), TEM (b) and HRTEM (d)-(h) micrographs of the as-synthesized ZnO
nanotetrapods.
10 nm
1 μm
100 nm
a)
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New insights on the mechanism of semiconductor nanostructures formed during vapor transport
113
4. MECHANISM OF CO-DEPOSITION OF ZNO NANOWIRES AND
NANOTETRAPODS
Because of using catalyst-free synthesis method in our work, the growth mechanism of ZnO
NWs could not be based on VLS model, involving in a catalyzed-tip or base growth mode,
depending on the metal-support interaction to be strong or weak. In our synthesis method, the
tube furnace was preheated to 1100 oC. The obtained product was with a white cotton color and
very uniform in diameter and length, suggesting that the nucleation and growth of ZnO
nanostructures (nanowires and nanotetrapods) may begin during vapor transportation. Indeed,
the melting temperature of ZnOx is approximately 419 oC (when x < 1), which is much lower
than that of ZnO (1975 oC) [17,19] ZnOx is produced through the reactions (1) and (2) [17]:
ଷ
ଶZnO(s) + (1−x)C(s) → (1−x)CO(g) + ZnOx(g) (1)
ZnO(s) + ሺଵି௫ሻଶ C(s) →
ሺଵି௫ሻ
ଶ CO2(g) + ZnOx(g) (2)
For more detailed reactions, it is not treated in this work and we refer the reader to our
previous work [12]. The ZnOx molecules aggregates are converted into ZnO clusters as revealed
in reaction (3):
ZnOx (clusters, x <1) +
ሺଵି௫ሻ
ଶ O2 → ZnO (clusters) (3)
The ZnO clusters are ideal nuclei centers to form ZnO nanostructures, as discussed below.
In this situation, the formation and growth of ZnO nanostructures are considered as self-
catalyzed and similar to that of the vapor-solid mechanism [17].
Figure 5. Diagram explaining the formation mechanism of ZnO nanowires under lamina flow conditions.
Tran Trung, Hoang Van Han, Nguyen Van Hieu
114
A possible growth mechanism of ZnO nanostructures in our synthesis method can be
explained using a heating curve. As shown in Figures 4 and 5, for the formation of ZnO
nanowires and nanotetrapods respectively, it takes 110 min for the tube furnace to reach the
process temperature of 1100 oC. During the reaction time, the ZnOx vapor, gases CO and CO2
are formed via reactions (1, 2), and after vaporization into separated flows, they are transported
in side by side by the supporting gas mixture of nitrogen and air (Fig. 5). A mixture containing a
large quantity of graphite with ZnO powder ensures the availability of sufficient concentration of
ZnOx vapor and high super saturation condition in the central region of the furnace. However the
hydrodynamic regime is under different flow conditions, lamina flow for the supporting gas
flows running along the axis of the tube reactor and turbulent flow for the ones running close to
the wall (see Figs. 5 and 6).
Within every supporting gas flow running under lamina flow conditions, the ZnOx
molecules vapor are transported to the low temperature region. During that time they are
oxidized further and aggregated into nanoclusters of ZnO via reaction (3) due to the reduction of
the transported vapors rate and absorption of ZnOx molecules and aggregates together (Fig. 5).
Meanwhile, a slight flow of CO2 prevents aggregation of the vapor ZnOx; therefore, uniform and
high aspect ratio ZnO NWs are formed.
Figure 6: Diagram explaining the formation mechanism of ZnO nanotetrapods under turbulent flow
conditions.
In parallel to the lamina supporting gas flows running along the central axis of the tube
reactor, the vapors were transported by the supporting gas flows that running along and close to
the wall (see Fig. 6) are under turbulent flow conditions. In general, turbulent flow is time-
dependent, rotational, and three dimensional. Therefore there usually exist small perturbations
imposed on the flow originated from the roughness of a quartz tube reactor, from small
variations in the supporting gas flows caused by presence of CO, CO2, ZnOx, ZnO vapors, ZnO
clusters (suspended solids) having different mass, etc. These make advantages for oriented
connects of ZnO clusters to form some aspects of nanotetrapods in the way to achieve minimum
free energy of the system (tetrapod nuclei and ZnO vapor clusters). Figure 5 represents diagram
explanation of the formation mechanism of nanotetrapods. As seen the vapor ZnOx molecules
that were transported in the supporting gas flow were oxidized further into ZnO vapors and
aggregated into ZnO nanoclusters. Under turbulent flow conditions, in the initial stages of the
New insights on the mechanism of semiconductor nanostructures formed during vapor transport
115
growth of ZnO nanotetrapods, the ZnO molecules were connected together to form ZnO
nanotetrapod nuclei having eight tetrahedral crystals named the octa-twin model as proposed by
Takeuchi et al [20]. As FE-SEM and HR-TEM studies revealed that the ZnO nanotetrapods that
were synthesized successfully are characteristic of structure of very uniform in diameter and
length. It revealed that the adsorption of ZnO molecular vapors and connections of ZnO clusters
with a ZnO nanotetrapod nucleus in the way to achieve minimum free energy of the system. This
growth is different the growth by VLS or/and VS mechanism that occurred under static
conditions with high or ultimate high vacuum where some growth facets of a ZnO nucleus can
achieve faster growth rates, while inhibiting the growth rates in other directions [1].
5. CONCLUSION
Using thermal evaporation and vapor transport method, the produced ZnO: nanowires and
nanotetrapods were co-deposited under atmospheric pressure. FE-SEM and HRTEM studies
revealed that both structure are very uniform and high aspect ratio structure and a diameter of
approximately 30 nm and a length of several micrometers. The XRD examinations revealed that
the produced ZnO are identified as hexagonal wurtzite ZnO phase and have highly crystallized
structure with strong and sharp ZnO peaks of narrow spectral widths but without characteristic
peaks of the impurities. The new insights on the mechanism of co-deposition of ZnO nanowires
and nanotetrapods during vapor transport were proposed.
Acknowledgement. The authors acknowledge the support from the Vietnam Ministry of Education and
Training under Scientific Research program for a basic research project B2016-SKH-01 to work at Hung-
Yen University of Education and Technology.
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New insights on the mechanism of semiconductor nanostructures formed during vapor transport
117
TÓM TẮT
GIẢI THÍCH MỚI VỀ CƠ CHẾ HÍNH THÀNH CẤU TRÚC NANO CỦA VẬT LIỆU BÁN
DẪN TRONG QUÁ TRÌNH VẬN CHUYỂN PHA HƠI Ở ẤP SUẤT KHÍ QUYỂN
Trần Trung1*, Hoàng Văn Hán1, Nguyễn Văn Hiếu2**
1 Trường Đại học Sư phạm Kỹ thuật Hưng Yên, Khoái Châu, Hưng Yên, Việt Nam
2 Viện ITIMS, Trường Đại học Bách Khoa Hà Nội, Số 1 Đại Cồ Việt, Hà Nội, Việt Nam
*Email: tr_trunghut@yahoo.com
Trong quá trình bốc bay nhiệt hình thành đồng thời hai dạng nano ZnO là dây nano và nano
tetrapod có tỉ số chiều dài/đường kính lớn với cấu trúc đồng nhất. Trong quá trình bốc bay là quá
rình vận chuyển pha hơi của hỗn hợp bột ZnO và Các bon với tỉ lệ khối lượng 1:1 tại nhiệt đô
1100 oC bằng dòng hỗn hợp không khí và N2 có lưu lượng khác nhau. Đặc trưng cấu trúc và hình
thái bề mặt của vật liệu cấu trúc nano ZnO được tổng hợp có cấu trúc tinh thể cao với đường
kính trung binh cỡ 30 nm, chiều dài vài micromet. Báo cáo này chúng tôi đưa ra cơ chế hình
thành đồng thời hai dạng vật liệu trong quá trình vận chuyển pha hơi ở ấp suất khí quyển.
Từ khóa: dây nano ZnO, nanotetrapod, tỉ số dọc-ngang cao, đồng ngưng tụ, hơi.
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